Numerical Calculation on Temperature and Flow Field Distribution of DC-RF Plasma

The integrated direct current-radio frequency(DC-RF)plasma has great advantages in the field of material synthesis. The influence of changes in operating parameters is numerically analyzed by a direct currentradio frequency(DC-RF)plasma model based on magneto-hydrodynamic formulations. The calculated results reveal that the increase of DC arc current and working gas flow rate raises the plasma velocity in the central region of the DC-RF plasma torch and changes the distribution of temperature and flow field in the same region. But the plasma velocity and temperature profiles on the torch exit plane are little affected by the increase of DC arc current and working gas flow rate. Accordingly,the present integrated numerical analysis suggests that the DC-RF plasma flow field profiles are controllable by adjusting the DC arc current and working gas flow rate to meet the needs of specific material handling processes.