Preparation and Properties of Low Temperature Activated TitaniumZirconium-Vanadium Non-Evaporable Getter Films

Non-evaporable getter film is an important material widely used in the vacuum field in recent years.However,the excessively high activation temperature required by the getter film limits its application scenarios.In this paper,a constant ratio titanium-zirconium-vanadium alloy was used as the target material to deposit the non-evaporable getter film with good activation performance by DC magnetron sputtering.The surface chemical state of the film was analyzed by X-ray photoelectron spectroscopy.The results showed that the surface composition of thin films changed from high oxidation state to low oxidation state and then to metal state with the increase of heating temperature.Significant activation of this getter film began at as low as 150℃,and the degree of activation further increased after the temperature increased.The getter film had a good gettering performance after activation,and the film had reliable stability after long-term use.