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KANG Lanlan, WANG Junyan, ZHOU Xuyi, QU Yalin. Effect of Co-W-WC Proportion on the Microstructure and Optical Properties of SiO2 Film Prepared by HVOF for Sensor[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(6): 546-550. DOI: 10.13922/j.cnki.cjvst.202006052
Citation: KANG Lanlan, WANG Junyan, ZHOU Xuyi, QU Yalin. Effect of Co-W-WC Proportion on the Microstructure and Optical Properties of SiO2 Film Prepared by HVOF for Sensor[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(6): 546-550. DOI: 10.13922/j.cnki.cjvst.202006052

Effect of Co-W-WC Proportion on the Microstructure and Optical Properties of SiO2 Film Prepared by HVOF for Sensor

  • The absorption layers of CO-W-WC with different ratios were prepared by supersonic flame spraying(HVOF). Then the SiO2 composite film was prepared on the surface of the absorption layer by the sol-gel method,and its microstructure and optical properties were tested. The results show that characteristic peaks of Co,W,and WC are formed in the composite film,and some Hcp-Co particles transform into Fcc-Co structure in the spraying stage. After gradually increasing the amount of WC,fewer dispersive unmelted particles were formed on the surface of the composite film,and a smooth and dense structure was obtained. When W:WC reaches 1:1,it helps to reduce the surface roughness and make the absorption layer obtain lower emissivity. After gradually reducing the ratio of W/WC,the reflectivity increases and the absorption decreases,indicating that W has a stronger spectral absorption capacity than WC. SiO2 thin films have a low refractive index,which facilitates the transmission of shortwave light so that the absorption layer can obtain more incident light. After 100 h heat treatment,the absorptivity increased to 0.915 and the emissivity reached 0.2516. No composite film shedding was observed,indicating that the SiO2 composite film has stable optical properties.
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