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LU Yaowen, WU Duan, WANG Huan, YANG Chuansen, WEI Mengmeng, LIANG Mingchao, CHEN Jing, YAN Rui, CHEN Junru. The Design of a(105~10-8) Pa Vacuum Gauge Calibration Apparatus[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(1): 29-34. DOI: 10.13922/j.cnki.cjvst.202006027
Citation: LU Yaowen, WU Duan, WANG Huan, YANG Chuansen, WEI Mengmeng, LIANG Mingchao, CHEN Jing, YAN Rui, CHEN Junru. The Design of a(105~10-8) Pa Vacuum Gauge Calibration Apparatus[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(1): 29-34. DOI: 10.13922/j.cnki.cjvst.202006027
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The Design of a(105~10-8) Pa Vacuum Gauge Calibration Apparatus

  • 1. Beijing Engineering Research Center of Vacuum Metrology, Beijing 100029, China;

  • 2. Beijing Orient Institute of Measurement and Test, Beijing 100029, China;

  • 3. AECC South Industry CO., LTD, Hunan 412002, China

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  • Received Date: June 19, 2020
  • Available Online: September 10, 2023
    Graphical Abstract
    • Abstract
  • Aiming at the one-time calibration requirement of compound vacuum gauge with the range of(105~10-8) Pa,a corresponding calibration apparatus is designed.The apparatus is mainly composed of a calibration chamber,a vacuum measurement module,a pumping and gas supply module,a standard flowmeter,and a baking module.The designed calibration chamber is a spherical vessel,which is pumped by a series of molecular pumps and ion pump to obtain the ultimate vacuum degree of 10-9 Pa in the calibration chamber.The calibration is realized by the static comparison method,the dynamic comparison method,and the standard flow method.The static comparison method uses a capacitance diagram gauges(CDG) as the reference standard to achieve the calibration range of(105~10-1) Pa.The dynamic comparison method uses a spinning rotor gauge(SRG) as the reference standard to achieve the calibration range of(10-1~10-4) Pa.The standard gas flow method adopts a(10-5~10-9) Pa·m3/s standard gas flowmeter to provide the standard gas flow rate and achieve the calibration range of(10-4~10-8) Pa.The calibration range of the designed apparatus is(105~10-8) Pa with a combined standard uncertainty of 0.9%~2.3%,which solves the technical problem of one-time calibration for wide-range vacuum gauges.
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    • References (18)
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