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QI Jiadong, REN Guohua, FANG Yan, MENG Donghui, SUN Lichen, WANG Xudi. Newleak Artifact Based on Monolayer Graphene Membrane with Intrinsic Defects[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(4): 358-362. DOI: 10.13922/j.cnki.cjvst.202005021
Citation: QI Jiadong, REN Guohua, FANG Yan, MENG Donghui, SUN Lichen, WANG Xudi. Newleak Artifact Based on Monolayer Graphene Membrane with Intrinsic Defects[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2021, 41(4): 358-362. DOI: 10.13922/j.cnki.cjvst.202005021

Newleak Artifact Based on Monolayer Graphene Membrane with Intrinsic Defects

  • A new leak artifact based on monolayer graphene membrane with intrinsic defects is proposed.The monolayer graphene, synthesized via chemical vapor deposition method, is transferred onto a porous sintered stainless steel disc and characterized using Raman spectra.The conductance of He, N2,and Ar is measured employing our home-made test apparatus based on the difference method.The measured conductance implies that the transport of three types of gas enters molecular flow regime at pressures of up to 105Pa.Hence, the flow conductance of any other gas could be determined in case obtaining the conductance of one certain gas.Furthermore, these results also provide porous two-dimensional plain membrane material, such as graphene, with a new application orientation in fabrication of leak artifact.
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