Synthesis and Characterization of Hf-Doped Diamond-Like-Carbon Coating， Guilin 541004， China

The Hf-doped diamond-like-carbon(DLC) coatings were deposited by magnetron co-sputtering of Hf and C targets with CH₄ as the C-source on substrates of Si and glass.The influence of the Hf-content on the microstructures and optical band gap was investigated with X-ray diffraction,scanning electron microscopy,energy dispersive spectroscopy,Fourier transform infrared and ultraviolet visible(UV-Vis) spectroscopy.The results show that the Hf-content had a major impact.Specifically,as the Hf-content increased,the density of Hf-C nano-particles increased,the surface compactness improved simply because of decreasing grain-size;the optical band-gap decreased to 1.12~1.85 eV,resembling to that of semiconductor materials;and the sp²C ratio decreased,accompanied by an increasing density of π~π^* band.We suggest that the optical band gap of the Hf-doped DLC coatings may be tailored with appropriate Hf-content.