Formationof Micro/Nano-Structure on Polydimethylsiloxane Coating for Flexible Pressure Sensors:A Methodological Study

A novel technique was developed to directly form the micro/nano-structured polydimethylsiloxane(PDMS) coating,a state-of-the-art pressure-sensor material.A variety of the micro/nano-structures,fabricated by lithography on PDMS coatings deposited on Si-wafer,were characterized with scanning electron microscopy.The preliminary results show that the novel technique is capable of fabricating the well-defined micro/nano-patterns,including the circle,ellipse,square and rectangle pillar-arrays with uniform-height,good consistency,clear and steep(~90°) sidewall profile.When it comes to fabrication of different-sized PDMS micro/nano-patterns on industrial scale,the newly-developed technique outperforms the conventional method with Si-based mold because of lower production cost,higher efficiency,easier operation and better environmental friendliness,and because of no investment for complicated equipment in chemical etching and laser machining of Si-based mold.