Self-Developed Portable Calibration Apparatus of Vacuum Gauge with 10~5 Pa～10^-7 Pa Range:An Instrumentation Study

A novel type of portable automatic calibration apparatus has been successfully developed for the on-site calibration of vacuum gauge in(10⁵~10^-7) Pa range.The self-developed mobile calibrator,comprising the ultrahigh vacuum(UHV) chamber in 10^-8Pa base-pressure,double-pole molecular pump,lab-built compound standard gas flowmeter operating by flow and constant-volume methods in 10^-2~10^-10 Pa·m³/s range,host-computer and/or LCD touchscreen monitor,integrated the comparison and standard conductance calibration methods by means of modularization design.The prototyped vacuum gauge calibrator,500 mm×500 mm×600 mm in size and 5 kg in gross-weight,was extensively tested.The results show that the calibrator is capable of covering a wide range from 1×10⁵ Pa to 5×10^-7 Pa.We suggest that the newly-developed vacuum gauge calibrator be of increasing market demands and of much economic impact because of the wide calibration range,high automation and reasonable portability.