Lab-Built Test-Platform for Pumping-Speed Measurement and Calibration of CF400 Molecular Pump

The test platform was developed for on-line measurement and/or calibration of pumping-speed of molecular pump with an interface diameter of 400 mm.The lab-built test platform comprised the measurement dome module,compound standard flow-meter module,with full-scale range of 10~10^-9 Pam³/s,measurement and calibration module,with a magnetic suspension rotor vacuum gauge(SRG) as the reference,capable of evaluating pressure in 10^-1~10^-7 Pa range,and it measures and/or calibrates on-line the pumping-speed only in the throughput method.Test results show that the lab-built test platform is capable of precisely measuring a pumping-speed in 3000~5000 L/s range,with a combined standard uncertainty of 2.2%~4.4%.The lab-built test platform outperforms the conventional one for three reasons,including the one measurement method,significant smaller discrepancy for on-line measurement/calibration of pumping-speed,and direct measurement of the gases other than nitrogen.