Novel Type of Sliding-Vane Vacuum Pump with Tipple-Chamber: A Theoretical and Experimental Study

A novel type of sliding vane vacuum pump(SVVP),with triple-chamber and with a cylinder profile of sinusoidal spiral,was developed.The kinematics and dynamics of the SVVP with double and/or triple chambers were empirically approximated,mathematically modeled and theoretically analyzed.The performance of the prototyped SVVP with triple-chamber was experimentally evaluated with the lab-built test platform.The results show that the triple-chamber SVVP significantly outperforms the conventional double-chamber SVVP with a harmonic cylinder profile.To be specific,in the same geometrical dimensions,the pumping speed of the newly-developed triple-chamber SVVP was 37% higher than that of the double-chamber SVVP,reaching to 1 L/s and the lowest pressure was found to be 13 kPa.