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Huang Meilin, Ren Yongcong, Liang Jingpeng, Wang Xiaoru, Lin Xueying, Lu Shengguo. Synthesis and Characterization of Magnetron Sputtered Conductive Coating on Non-Woven Fabric Substrates[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(11): 937-943. DOI: 10.13922/j.cnki.cjovst.2019.11.01
Citation: Huang Meilin, Ren Yongcong, Liang Jingpeng, Wang Xiaoru, Lin Xueying, Lu Shengguo. Synthesis and Characterization of Magnetron Sputtered Conductive Coating on Non-Woven Fabric Substrates[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(11): 937-943. DOI: 10.13922/j.cnki.cjovst.2019.11.01

Synthesis and Characterization of Magnetron Sputtered Conductive Coating on Non-Woven Fabric Substrates

  • Conductive coatings,of stainless steel,Cu and CuO,were deposited on substrate of polypropylene(PP) non-woven fabric.The influence of the deposition conditions,including the base pressure,argon flow-rate,sputtering power,deposition rate and film thickness,on the anti-ultraviolet(infrared) behavior was investigated with X-ray diffraction,scanning electron microscopy,atomic force microscopy and Fourier transform infrared(FTIR) spectroscopy.The preliminary results show that the Cu-coating considerably increased the anti-ultraviolet function of the fabric.As expected,a higher sputtering power increased the deposition rate,improved the compactness,decreased the grain-size and strengthened the interfacial adhesion.A high pressure of residual gases negatively affected the film growth.The argon flow rate,pressure,deposition rate,and film thickness should be optimized depending on the anti-ultraviolet(infrared) requirements,applications and production cost.
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