Discharge Characteristics of Novel Aluminum-Based Microchannel Plasma Driven by Nanosecond Pulse

A novel type of microchannel array device was fabricated on aluminum substrate and the discharge characteristics of the microchannel plasma driven by bipolar nanosecond(ns) pulse were investigated.The plasma discharge driven by bipolar ns-pulse outperforms that driven by sinusoidal waveform,because of a higher concentration,a more obvious coupling and a more easiness to control.The influence of the overshoot voltage and pulse rising time of bipolar ns-pulse properties on the micro-plasma behavior was evaluated.The preliminary results show that the properties of bipolar ns-pulse have a major impact.To be specific,an overshoot voltage of 6% produced a change by 30% of the microchannel plasma discharge intensity.In addition,a decrease of the rising time,from 152 ns to 32 ns,increased the plasma discharge intensity by 30%.