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Gou Jitao, Zhao Ruipeng, Xu Yili, He Guanyuan, Chen Ran, Tao Bowan. Synthesis of YGBCO Superconducting Coatings by Metal Organic Chemical Vapor Deposition in Narrow Rectangular-Wedge Reactor[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(6): 466-471. DOI: 10.13922/j.cnki.cjovst.2019.06.03
Citation: Gou Jitao, Zhao Ruipeng, Xu Yili, He Guanyuan, Chen Ran, Tao Bowan. Synthesis of YGBCO Superconducting Coatings by Metal Organic Chemical Vapor Deposition in Narrow Rectangular-Wedge Reactor[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(6): 466-471. DOI: 10.13922/j.cnki.cjovst.2019.06.03
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Synthesis of YGBCO Superconducting Coatings by Metal Organic Chemical Vapor Deposition in Narrow Rectangular-Wedge Reactor

  • State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of Electronic, Chengdu 610054, China

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  • Received Date: March 04, 2019
  • Available Online: September 14, 2023
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    • Abstract
  • The Y0.5Gd0.5Ba2Cu3O7-x (YGBCO) superconducting coatings were synthesized by metal organic chemical vapor deposition (MOCVD) in a lab-built reactor with a narrow rectangular wedge deposition zone, comprising two tilted Cu-plates (300 mm×11 mm) inside the rectangular vacuum chamber to accelerate the velocity of metal organic vapor.The influence of the rectangular wedge reactor on the properties of the YGBCO coatings was investigated with X-ray diffraction, energy dispersive spectroscopy, scanning electron microscopy and critical current density (Jc) measurement.The results show that the rectangular wedge reactor had a major impact.To be specific, the compact, fairly uniform and single Y123-phased YGBCO coatings, 280 nm in thickness and grown in a 200 mm long reactor, had a Jc up to 3.5 MA/cm2 (measured at 77 K and 0 T).We suggest that the marrow rectangular wedge reactor be capable of rapidly and continuously growing high quality YBCO superconducting tape by MOCVD.
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    • References (20)
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