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Fu Xuecheng, Wang Ying, Quan Xueling, Ju Minni, Wang Fengdan. Mechanism for Black Particle Formation on Gold Coatings Deposited by Electron Beam Evaporation:A Theoretical and Experimental Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(5): 396-400. DOI: 10.13922/j.cnki.cjovst.2019.05.07
Citation: Fu Xuecheng, Wang Ying, Quan Xueling, Ju Minni, Wang Fengdan. Mechanism for Black Particle Formation on Gold Coatings Deposited by Electron Beam Evaporation:A Theoretical and Experimental Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(5): 396-400. DOI: 10.13922/j.cnki.cjovst.2019.05.07
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Mechanism for Black Particle Formation on Gold Coatings Deposited by Electron Beam Evaporation:A Theoretical and Experimental Study

  • Advanced Electronics Materials and Devices, Shanghai Jiao Tong University, Shanghai 200240, China

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  • Received Date: December 01, 2018
  • Available Online: September 14, 2023
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    • Abstract
  • Herein, we theoretically addressed the mechanism for the black particle formation, irregular shaped impurity grains (100 nm~1 μm in size), on gold coatings deposited by electron beam evaporation.We proposed that the localized strong field emission from the impurity cusp (or Tayler-cone) possibly formed on liquid gold surfaces because of carbon surface segregation or residue gas contamination, may account for the tip-discharge, resulting in high temperature evaporation and/or deposition of impurity cusp-apex on the gold coatings.The influence of the deposition conditions, including the evaporation power, shape and bombarding spot position of e-beam, on black-particle deposition was investigated.The experimental results show that the formation/discharge/evaporation/deposition of the cusps formed on liquid gold surfaces are responsible for the black particle formed on gold coatings grown by e-beam evaporation.The experimental and analytical results were found to be in good agreement.
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    • References (17)
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