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Zhang Fan, Tang Deli, Li Pingchuan, Zhao Jie, Jin Fanya. Design of High-Voltage Anode Layer Hall Ion Source: A 3D Simulation Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(4): 332-337. DOI: 10.13922/j.cnki.cjovst.2019.04.10
Citation: Zhang Fan, Tang Deli, Li Pingchuan, Zhao Jie, Jin Fanya. Design of High-Voltage Anode Layer Hall Ion Source: A 3D Simulation Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(4): 332-337. DOI: 10.13922/j.cnki.cjovst.2019.04.10

Design of High-Voltage Anode Layer Hall Ion Source: A 3D Simulation Study

  • The operation of anode layer Hall ion source was empirically approximated, mathematically modeled and numerically simulated in particle-in-cell and Monte-Carlo collision method for design optimization.The influence of the source structure and magnetic circuit on the discharge voltage range and stability was investigated.The simulated results show that the heightened magnetic field confinement makes the difference.To be specific, the modified magnetic field increases the discharge voltage range of the ion source by 50%, approaching an upper limit of 3000 V;and the newly-designed anode layer Hall ion source is capable of operating routinely and stably under the conditions of high voltage, low gas pressure and low current.We suggest that the simulated results be of some technological interest in design optimization and fabrication of anode layer Hall ion source.
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