Citation: | An Yuejun, Lou Ligang, Yang Tianyu, Wang Guangyu, Kong Xiangling, Deng Wenyu, Duan Yongli, Qi Lijun. Novel Permanent-Magnet Motor for Roots Vacuum Pump in Wafer Fabrication:A Simulation and Experimental Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(3): 185-190. DOI: 10.13922/j.cnki.cjovst.2019.03.01 |
[1] |
杨乃恒.干式真空泵的原理、特征及其应用[J].真空, 2000, 15 (3):1-9
|
[2] |
刘敏强.真空仪器设备应用与发展[J].中国仪器仪表, 2017, (9):21-23
|
[3] |
安跃军, 温宏亮, 安辉, 等.磁极调制式永磁电机的磁场分析与实验[J].电工技术学报, 2012, 27 (11):111-117
|
[4] |
Song X, Han B, Zheng S, et al.A Novel Sensorless Rotor Position Detection Method for High-Speed Surface PM Motors in a Wide Speed Range[J].IEEE Transactions on Power Electronics, 2017, 99:7083-7093
|
[5] |
柴嘉南.真空干泵驱动用宽调速永磁同步电动机设计与控制研究[D].沈阳:沈阳工业大学, 2018
|
[6] |
安跃军, 张志恒, 张振厚, 等.真空干泵用屏蔽电机无速度传感器带速重投控制系统[J].电工技术学报, 2018, 33 (12):2665-2675
|
[7] |
刘坤, 李培印, 李强, 等.三轴罗茨真空泵的抽气理论和结构设计[J].真空科学与技术学报, 2015, 35 (8):934-939
|
[8] |
安跃军, 孟昭军.电机系统及其计算机仿真[M].北京:机械工业出版社, 2014:118-121
|
[9] |
Kolondzovski Z, Sallinen P, Belahcen A, et al. Rotordynamic Analysis of Different Rotor Structures for High-Speed Permanent-Magnet Electrical Machines[J].Electric Power Applications Iet, 2010, 4 (7):516-524
|
[10] |
安跃军, 张强, 李文瑞, 等.新型移相式屏蔽电动机屏蔽套涡流与温升分析[J].西安交通大学学报, 2014, 48 (6):50-54
|
[11] |
刘坤, 巴德纯, 王光玉, 等.多级罗茨干泵泵内传热与变形的计算和实验研究[J].真空科学与技术学报, 2011, 31 (1):100-104
|
[12] |
Etemadrezaei M, Wolmarans J, Polinder H, et al.Precise Calculation and Optimization of Rotor Eddy Current Losses in High Speed Permanent Magnet Machine[J].IET Electric Power Applications, 2010, 4 (7):516-524
|
[13] |
安跃军, 张振厚, 张强, 等.干式涡旋真空泵用特种电机温度场仿真与实验[J].电机与控制学报, 2017, 21 (8):48-52
|
[14] |
莫丽红, 全力, 朱孝勇, 等.定子永磁式双转子电机设计与实验研究[J].电工技术学报, 2014, 29 (9):74-82
|
[15] |
张以忱.关于真空泵基础压力与罗茨真空泵特征性能指标的探讨[J].真空, 2016, 53 (02):53-56
|
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