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Chen Zhengwei, Liu Shu, Bu Huaili, Gao Guangwei. Fabrication of Indium/Tin Oxides Target by Direct Resistive Heating in Hot Press Furnace[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(1): 78-81. DOI: 10.13922/j.cnki.cjovst.2019.01.12
Citation: Chen Zhengwei, Liu Shu, Bu Huaili, Gao Guangwei. Fabrication of Indium/Tin Oxides Target by Direct Resistive Heating in Hot Press Furnace[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2019, 39(1): 78-81. DOI: 10.13922/j.cnki.cjovst.2019.01.12

Fabrication of Indium/Tin Oxides Target by Direct Resistive Heating in Hot Press Furnace

  • High density target of indium tin oxides (ITO) was fabricated in a novel technique: rapid direct resistive heating in argon atmosphere with the home-built hot press furnace. The original work included the direct resistive heating with switch power supply and the female dies designed via numerical simulation with ANSYS software, made of carbon-carbon composite material and strengthened with molybdenum wire, 5 mm in diameter. The newly-developed ITO fabrication technique outperforms the conventional ones, including the cold pressing/sintering, hot isostatic pressing, sintering and hot pressing, because of higher density of ITO target, better crack-resistance, lower production cost, smaller equipment budget, and oxygen-free pressing atmosphere.
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