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Xu Yangguang, Pan Xiaoxia, Liu Xiaojian, Wang Tong, Cai Yue, Ceng Xiangbing, Du Hongwei, Liao Bin. Back-Pressurizing Leak Detection of Airtight Container with Large Volume[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(10): 839-845. DOI: 10.13922/j.cnki.cjovst.2018.10.04
Citation: Xu Yangguang, Pan Xiaoxia, Liu Xiaojian, Wang Tong, Cai Yue, Ceng Xiangbing, Du Hongwei, Liao Bin. Back-Pressurizing Leak Detection of Airtight Container with Large Volume[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(10): 839-845. DOI: 10.13922/j.cnki.cjovst.2018.10.04

Back-Pressurizing Leak Detection of Airtight Container with Large Volume

  • We addressed the back-pressurizing leak detection of airtight container with a large volume up to 1.17×104 cm3. The influence of the leak detection conditions, including the adsorption/desorption of residue gases on inside/outside surfaces, and pressure and holding time of pre-injected helium, on the leakage-rate was theoretically analyzed and experimentally measured with the lab-built test platform. The results show that at a predicted leakagerate in the order of 10-6Pa·m3/s, the back-pressurizing leak detection works pretty well. When it comes to the lowest detectable leakage-rate at a predicted leakage-rate below 10-6 Pa·m3/s, especially below 10-7 Pa·m3/s, the back-pressurizing leak detection outperformed the conventional one with helium mass spectrometer. The problem of large error remains to be solved to more accurately predict the background leakage-rate of the large-sized container with a leakage-rate below 10-7 Pa·m3/s.
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