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Zhang Weigang, Li Yuanyuan, Sun Xudong, Wang Peng, Yan Wenjuan. Analysis of Market Demand and Supply of Sputtering Target in Flat-Panel Display Industry[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(9): 821-824. DOI: 10.13922/j.cnki.cjovst.2018.09.15
Citation: Zhang Weigang, Li Yuanyuan, Sun Xudong, Wang Peng, Yan Wenjuan. Analysis of Market Demand and Supply of Sputtering Target in Flat-Panel Display Industry[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(9): 821-824. DOI: 10.13922/j.cnki.cjovst.2018.09.15

Analysis of Market Demand and Supply of Sputtering Target in Flat-Panel Display Industry

  • The status-quo of the domestic market demand and supply of metal and/or alloy target materials for synthesis of thin film by magnetron sputtering in 8. 5-generation production line of thin-film transistor (TFT) liquid crystal display panel (LCD), was tentatively reviewed. The discussions with specific examples focused on:i) large annual consumption of target material in China, including but not limited to Al, Cu, Mo, and MoNb-alloy targets, comprising 12 plate-strip sub-target (2650 mm×210 mm×18 mm in size); ii) leading suppliers of A-and Cu-targets, such as ULVAC Japan LCD; and iii) high quality plate strip Mo-target manufactured by China's companies, for instance, Luoyang Sifon Electronic Materials Co. When it comes to advanced targets fabricated by self-reliance, including Mo Nb-alloy target, the problems and possible solutions were briefly discussed in a thought provoking way.
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