Analysis of Market Demand and Supply of Sputtering Target in Flat-Panel Display Industry
-
-
Abstract
The status-quo of the domestic market demand and supply of metal and/or alloy target materials for synthesis of thin film by magnetron sputtering in 8. 5-generation production line of thin-film transistor (TFT) liquid crystal display panel (LCD), was tentatively reviewed. The discussions with specific examples focused on:i) large annual consumption of target material in China, including but not limited to Al, Cu, Mo, and MoNb-alloy targets, comprising 12 plate-strip sub-target (2650 mm×210 mm×18 mm in size); ii) leading suppliers of A-and Cu-targets, such as ULVAC Japan LCD; and iii) high quality plate strip Mo-target manufactured by China's companies, for instance, Luoyang Sifon Electronic Materials Co. When it comes to advanced targets fabricated by self-reliance, including Mo Nb-alloy target, the problems and possible solutions were briefly discussed in a thought provoking way.
-
-