Properties Modification of Diamond-Like-Carbon Films by Doping of Copper or Chromium

The diamond-like-carbon (DLC) coatings were synthesized and in-situ modified with metal dopant (Cu and/or Cr) by ion beam assisted magnetron sputtering, to reduce stress, on p-type Si substrate. The influence of the doped metal-type on the microstructures and trobological properties of the metal-doped (Me-DLC) coatings were investigated with high resolution transmission microscopy, scanning electron microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, energy dispersive spectroscopy, plasma emission spectrometer and conventional mechanical probes. The results show that the Cu-DLC (or Cr-DLC) coating displayed a Cu- (or Cr-) distribution with a depth gradient, because of C-poisoned target. For example, the Cu- (or Cr-) content increased from below 1. 0% (at.) on the surface to above 13% at the DLC/Si interface in the self-organized Me-DLC coatings. When it comes to properties, including the C-Cu (or C-Cr) bond, hardness, wear-rate and friction coefficient, little difference between the two Me-DLC coatings was observed.