Latest Development of Non-evaporable Getter Materials

The latest advance in non-evaporable getter materials, comprising Zr-based and Ti-based non-evaporable getter materials, was tentatively reviewed. The discussions with specific examples centered on:i) the main technical strengths and weaknesses of the Zr-based and Ti-based getters; ii) their preparation and modification techniques, including but not limited to the fabrication of nano-structured getters, thin film growth methods such as magnetron sputtering, chemical vapor deposition and spraying coating, electroplating/arc ion plating, synthesis of a variety of getter alloys; and iii) the applications of the modified Zr-based and Ti-based getters. In addition, the development trends, existing technical problems and possible solutions of Zr-based and Ti-based getter materials were also briefly discussed, respectively, in a thought provoking way. However, the adsorption behavior of the Zr-based and Ti-based getters in high vacuum and/or ultra-high vacuum remains to be investigated.