Numerical Simulation of Dual-Frequency Helium Discharge at Atmospheric Pressure

The characteristics of the bare metal electrodes, dual-frequency helium gas discharge at atmospheric pressure were mathematically formulated with 1-D fluid model, in which the reactions involving 6 particle types and 13 elements were considered, theoretically analyzed and numerically simulated.The impact of the high/low frequency (HF/LF) sources and matching modes on the plasma behavior were investigated.Besides, the electron heating mechanism was also discussed.The simulated results show that the HF source affects the plasma properties stronger than the LF source.To be specific, the e-density and e-temperature increase with the increases of the voltage and frequency of the HF source, but decreases with an increasing voltage of the LF source; and the LF source frequency little affects the e-density and e-temperature.We suggest that the simulated results may be of some technological interest in the helium plasma control.