Citation: | Wang Haibo, Wang Xiaoyan, Zhang Zhongxiang, Lu Shibin, Wang Feifei, Yang Jin. Mechanism Study of Fluoride Ion on the Effect of Silicon Polishing[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(6): 508-514. DOI: 10.13922/j.cnki.cjovst.2018.06.11 |
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