Novel Rapid Regeneration Device for Lab-Built Cryopump

A novel rapid regeneration device for the lab-built cryopump, 800 mm in diameter and installed in Heavy Ion Research Facility in Lanzhou (HIRFL), was developed to significantly shorten the long spontaneous regeneration time.The original work included the resistive heaters fixed on the shielding case and cryo-panel and an automatic temperature control unit.The influence of the resistive heating power on the time evolution of the temperature distributions in the shielding case and cryo-panel was mathematically modeled, theoretically analyzed, numerically simulated in finite element method with ANSYS software and experimentally tested.The simulated results show that the final temperature distributions of the shielding case and cryopanel, automatically heated at 56.8 and 36.9 W, respectively, satisfied well the rapid regeneration requirements of the cryopump.