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Luo Rongrong, Dan Min, Li Pengyuan, Jin Fanya, Zhou Yi. Effect of Pulse Bias Voltage on Solid Lubrication Behavior of Magnetron Sputtered MoS2 CoatingsJ. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(3): 208-213. DOI: 10.13922/j.cnki.cjovst.2018.03.07
Citation: Luo Rongrong, Dan Min, Li Pengyuan, Jin Fanya, Zhou Yi. Effect of Pulse Bias Voltage on Solid Lubrication Behavior of Magnetron Sputtered MoS2 CoatingsJ. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(3): 208-213. DOI: 10.13922/j.cnki.cjovst.2018.03.07

Effect of Pulse Bias Voltage on Solid Lubrication Behavior of Magnetron Sputtered MoS2 Coatings

  • The MoS2 coatings, as a solid lubrication material for nuclear fusion reactor, were deposited by single-polarity pulse magnetron sputtering on substrate of iron-based alloy A286. The influence of the pulse bias voltage on the microstructures, interfacial adhesion and tribological properties of the coatings was investigated with X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy and mechanical probes. The results show that the pulse bias voltage had a major impact. For example, as the bias voltage increased from 300 to 800 V, the interfacial adhesion changed in a decrease-increase mode, accompanied by an increase-decrease variation in the grainsize; grown at 800 V, the MoS2 coating had the lowest defect-density, highest compactness, weakest internal stress, and strongest interfacial adhesion, because of high-energy particles bombardment. The preferential island growth orientation and friction also depended on the pulse bias voltage; and the abrasive wear mechanism dominated.
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