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Luo Rongrong, Dan Min, Li Pengyuan, Jin Fanya, Zhou Yi. Effect of Pulse Bias Voltage on Solid Lubrication Behavior of Magnetron Sputtered MoS2 Coatings[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(3): 208-213. DOI: 10.13922/j.cnki.cjovst.2018.03.07
Citation: Luo Rongrong, Dan Min, Li Pengyuan, Jin Fanya, Zhou Yi. Effect of Pulse Bias Voltage on Solid Lubrication Behavior of Magnetron Sputtered MoS2 Coatings[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(3): 208-213. DOI: 10.13922/j.cnki.cjovst.2018.03.07

Effect of Pulse Bias Voltage on Solid Lubrication Behavior of Magnetron Sputtered MoS2 Coatings

  • The MoS2 coatings, as a solid lubrication material for nuclear fusion reactor, were deposited by single-polarity pulse magnetron sputtering on substrate of iron-based alloy A286. The influence of the pulse bias voltage on the microstructures, interfacial adhesion and tribological properties of the coatings was investigated with X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy and mechanical probes. The results show that the pulse bias voltage had a major impact. For example, as the bias voltage increased from 300 to 800 V, the interfacial adhesion changed in a decrease-increase mode, accompanied by an increase-decrease variation in the grainsize; grown at 800 V, the MoS2 coating had the lowest defect-density, highest compactness, weakest internal stress, and strongest interfacial adhesion, because of high-energy particles bombardment. The preferential island growth orientation and friction also depended on the pulse bias voltage; and the abrasive wear mechanism dominated.
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