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Xie Wenjun, Meng Jun, Li Peng, Dong Ziqiang, Luo Cheng, Li Min, Chai Zhen, Chang Jianjun, Liu Xiaojun, Lin Xiaojian. Surface Desorption Induced by Heavy Ion Bombardment:A Simulation and Experimental Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(2): 157-162. DOI: 10.13922/j.cnki.cjovst.2018.02.14
Citation: Xie Wenjun, Meng Jun, Li Peng, Dong Ziqiang, Luo Cheng, Li Min, Chai Zhen, Chang Jianjun, Liu Xiaojun, Lin Xiaojian. Surface Desorption Induced by Heavy Ion Bombardment:A Simulation and Experimental Study[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(2): 157-162. DOI: 10.13922/j.cnki.cjovst.2018.02.14

Surface Desorption Induced by Heavy Ion Bombardment:A Simulation and Experimental Study

  • Herein, we addressed theproblem ofpressure build-up inheavy ion accelerator, originated from bombardment of heavy ion beamon vacuum chamber walls. Desorption of the adsorbed molecules/ions on oxygen-free Cu-surfaces was theoretically analyzed, numerically simulated with software Molflow + and experimentally investigated with the lab-built test platform. The impact of the properties of Xe10+ and O+ beams on the electronic energy loss, desorption yields and dynamic changes in pressure was investigated. The results show that the energy and intensity of the ion beams significantly affected the dynamic changes in pressure. For example, as the energy increased, the desorption yields increased; bombardment for a long time resulted in beam scrubbing effect, i. e. a decrease of the gases desorption yield. Moreover, the square of electronic energy loss was proportional to the desorption yields. The measured results were in good agreement with those reported in literature.
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