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Dan Min, Jin Fanya, Li Jian, Wang Jianbao, Li Linqun, Chen Xiaojun. Effect of Implantation Energy on Deuterium Thermal Desorption from Deuterium Ion Implanted Li4SiO4 Ceramics[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(1): 75-79. DOI: 10.13922/j.cnki.cjovst.2018.01.15
Citation: Dan Min, Jin Fanya, Li Jian, Wang Jianbao, Li Linqun, Chen Xiaojun. Effect of Implantation Energy on Deuterium Thermal Desorption from Deuterium Ion Implanted Li4SiO4 Ceramics[J]. CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY, 2018, 38(1): 75-79. DOI: 10.13922/j.cnki.cjovst.2018.01.15

Effect of Implantation Energy on Deuterium Thermal Desorption from Deuterium Ion Implanted Li4SiO4 Ceramics

  • Herein, we experimentally addressed the influenceof D+ ion energy on the thermal desorption of deuterium from D+ -ion implanted Li4SiO4 ceramics.The energy dependence of the penetration depth and average displacement damage was simulated with SRIM software.The results show that the implantation energies (25, 35, 45 and 55 ke V) significantly affected the penetration depth and thermal desorption behavior of deuterium.To be specific, as the implantation energy increased, the penetration depth linearly increased, accompanied by a decrease of the average displacement damage.As shown in the thermal-desorption spectra, D2 was desorbed in the 300~550℃ and 550~750℃ ranges, respectively; whereas HDO and D2O were released in 600~780℃ range with the dominance of D2O phase.Moreover, the partial reconstruction of the implantation-induced surfaces, with randomly distributed defects including the quasi-circular bubbles, pits and pinholes, was observed after the thermo-desorption.
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