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Atomic Manufacturing Technology for the Future Information Devices
YANG Haitao
2023, 43(5): 367-389. DOI: 10.13922/j.cnki.cjvst.202304007
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The Development of Calibration of Ultrasensitive Leak Detection
WANG Xiyue, LU Yaowen, CHEN Qianrui, DONG Yunning, WEI Mengmeng, YANG Chuansen, YAN Rui, QI Jing
2023, 43(5): 390-395. DOI: 10.13922/j.cnki.cjvst.202111011
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Dry Selective Etching of Si0.7Ge0.3 for Horizontal GAA Inner Spacer Module
LIU Yang, LI Junjie, WU Cinan, ZHANG Qingzhu, WANG Guilei, ZHOU Na, GAO Jianfeng, KONG Zhenzhen, HAN Jianghao, LUO Yanna, LIU Enxu, YANG Tao, LI Junfeng, YIN Huaxiang, LUO Jun, WANG Wenwu
2023, 43(5): 396-402. DOI: 10.13922/j.cnki.cjvst.202212018
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Molecular Dynamics Study on Condensation Induced by Water Vapor Plasma
LI Sen, XU Yao, ZHANG Zhengyu, TAO Zhengde, MA Tingting, HE Xin
2023, 43(5): 403-409. DOI: 10.13922/j.cnki.cjvst.202211009
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Structural Stability Analysis and Test Evaluation for Large Vacuum Vessels
HE Shaodong, WANG Huaxin, LIU Baorui, LI Yunheng, SHI Jiankun, QIAN Du, YANG Jian
2023, 43(5): 410-417. DOI: 10.13922/j.cnki.cjvst.202211003
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Plasma Characteristics Analysis and Coil Optimization in Inductively Coupled Chambers
ZHANG Yi, WU Yongming, ZHOU Tie
2023, 43(5): 418-425. DOI: 10.13922/j.cnki.cjvst.202209008
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Effects of Bias Voltage on Zirconium Film Deposited by Arc Ion Plating
ZHAO Shike, LIU Jinyun, YU Wenjie
2023, 43(5): 426-431. DOI: 10.13922/j.cnki.cjvst.202211025
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Exploring the Effect of CO2 on the Quality of Single Crystal Diamond Drown by MPCVD with Optical Emission Spectrum
WU Zhengxin, MAN Weidong, JIA Yuanbo, FAN Bingqing, LIN Zhidong
2023, 43(5): 432-437. DOI: 10.13922/j.cnki.cjvst.202208023
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Circuit Model of Electrodeless Lorentz Thruster
SHI Feng, SHI Xin
2023, 43(5): 438-443. DOI: 10.13922/j.cnki.cjvst.202207009
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Influence of RF Driven Frequency on the Tokamak Glow Discharge Cleaning Characteristics
HUANG Xiangmei, CAO Chengzhi, HU Yi, ZHOU Jun, GAO Xiaoyan, CUI Chenghe
2023, 43(5): 444-449. DOI: 10.13922/j.cnki.cjvst.202211006
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Structure Optimization of Steam Blanching and Hot Air Vacuum Drying Equipment for Fruits and Vegetables
WANG Dong, NIE Hao, YUAN Yuejin, XIE Yongkang, ZHAO Zhe, LU Yuming
2023, 43(5): 450-459. DOI: 10.13922/j.cnki.cjvst.202210016
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