Abstract: The conductive FeCrNi coatings were deposited by magnetron co-sputtering of the target,comprising distinct Ni,Cr and Fe componentd material,on Si substrate.The influence of the sputtering power on the microstructures,resistivity and hardness of the FeCrNi coatings was investigated with X-ray diffraction,scanning electron microscopy and hardness tester.The preliminary results show that the sputtering power significantly affected the microstructures and conductivity of the FeCrNi coatings.To be specific,as the sputtering power increased,the grain-size and crystallinity of the columnar(111) preferentially oriented FCC-structured grains increased,the lattice constant,surface hardness and resistivity decreased.In addition,the interfacial adhesion was found to increase with an increase of the sputtering power,as expected.