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吸脱附竞争下的密闭腔室真空压强演变

Evolution of Vacuum Pressure in an Enclosed Chamber under Adsorption-Desorption Competition

  • 摘要: 密闭真空腔室内的压强演变是材料脱附放气与吸气剂吸附相互竞争的动态过程,精准预测压强演变对器件寿命评估至关重要。本文基于吸气动力学理论与菲克扩散定律,建立了包含表面吸附、体内扩散和壁面放气的吸脱附耦合动力学模型。采用COMSOL多物理场软件,以体扩散放气和吸气剂吸附为边界条件,构建了腔室压强演变的数值仿真方法。以304不锈钢腔室为研究对象,通过静态升压法测定了不同温度下的壁面放气率并拟合得到放气特性参数。对两款ZrVFe非蒸散型吸气剂的抽速特性曲线进行拟合,提取了吸气动力学参数。在此基础上,开展了恒温与变温工况下的真空维持实验。结果表明,温度升高显著增大壁面放气率,加快压强回升速率。仿真与实验在恒温及变温条件下均吻合较好,模型可准确复现抽速随吸附量增加的衰减规律。研究结果可为密闭真空器件的吸气方案优化及寿命预估提供参考。

     

    Abstract: The pressure evolution within an enclosed vacuum chamber is a dynamic process where material desorption and gas release compete with the adsorption of the getter. Accurate prediction of the pressure evolution is crucial for evaluating the lifespan of the device. Based on the adsorption dynamics theory and Fick's diffusion law, a coupled adsorption-desorption kinetic model including surface adsorption, in-body diffusion, and wall gas release was established. Using the COMSOL multi-physics software, with the boundary conditions of in-body diffusion gas release and getter adsorption, a numerical simulation method for the pressure evolution of the chamber was constructed. Taking a 304 stainless steel chamber as the research object, the wall gas release rate at different temperatures was measured by the static pressure rise method and the release characteristics parameters were fitted; the suction velocity characteristic curves of two ZrVFe non-evaporable getters were fitted to extract the adsorption dynamics parameters. On this basis, vacuum maintenance experiments under constant temperature and variable temperature conditions were carried out. The results show that an increase in temperature significantly increases the wall gas release rate and accelerates the pressure recovery rate; the simulation and experiments were in good agreement under both constant and variable temperature conditions, and the model can accurately reproduce the attenuation law of pumping speed with the increase in sorbed quantity. The research results can provide a reference for the optimization of the getter scheme and life prediction of enclosed vacuum devices.

     

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