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沉积时间对射频磁控溅射制备DLC膜结构与性能的影响

Effect of Deposition Time on Structure and Properties of DLC Films Prepared by RF Magnetron Sputtering

  • 摘要: 针对车载热成像系统红外窗口在红外增透与耐腐蚀性能的应用兼容需求,文章采用射频磁控溅射在硅基上制备不同沉积时间(1、2、3、4 h)的DLC薄膜。通过SEM、拉曼和XPS对薄膜的形貌、化学键合表征,结合3–5 μm波段透过率测试与24 h中性盐雾试验,研究沉积时间对DLC薄膜红外透过性能与耐盐雾腐蚀性能的影响规律。结果表明,随沉积时间增加,薄膜厚度逐渐增加,sp2/sp3比值由1.31升至1.62,表明石墨化趋势增强,同时膜基界面缺陷由无到有并逐步加剧。而3–5 μm波段平均透过提升率呈先升后降趋势,由1 h的26.36%提高至2 h的29.86%,由厚度匹配带来的干涉增透效应。随后下降至4 h的7.86%,透过性能衰减主要源于界面缺陷诱发的散射增强与石墨化加剧导致的吸收上升的协同作用。24 h盐雾试验表明,仅1 h样品无起皮/脱膜现象,其余样品的起皮/脱膜现象则是因为sp3含量下降导致结构稳定性降低以及界面缺陷协同作用。研究为车载红外窗口DLC镀层工艺优化提供了实验数据支撑。

     

    Abstract: To address the compatible application requirements for infrared anti-reflection and corrosion resistance of infrared windows in vehicle-mounted thermal imaging systems. DLC films with different deposition times (1, 2, 3, and 4 h) are deposited on silicon substrates via radio frequency (RF) magnetron sputtering. The morphological features and chemical bonding states of the films are characterized by SEM, Raman and XPS. Combined with transmittance measurements in the 3–5 μm waveband and 24 h neutral salt spray tests, the influence of deposition times on the infrared transmittance performance and salt spray corrosion resistance of DLC films is investigated. The results show that the film thickness increases gradually with the increase in deposition times. The sp2/sp3 ratio increases from 1.31 to 1.62, indicating a strengthened graphitization tendency. Meanwhile, film-substrate interface defects emerge and aggravate progressively from absence to presence. The average transmittance enhancement rate in the 3–5 μm waveband shows a trend of first increasing and then decreasing. It rises from 26.36% at 1 h to 29.86% at 2 h, which is due to the interference anti-reflection effect induced by thickness matching, and then decreases to 7.86% at 4 h. The deterioration of transmittance performance is mainly caused by the synergistic effect of enhanced scattering induced by film-substrate interface defects and increased absorption resulting from aggravated graphitization. The 24 h neutral salt spray tests demonstrate that only the sample with 1 h deposition time exhibits no peeling or delamination. The occurrence of such phenomena in the other samples is attributed to the synergistic effect of reduced structural stability caused by the decrease in sp3 content and the presence of film-substrate interface defects. This study provides experimental data support for the process optimization of DLC films on infrared windows of vehicle-mounted thermal imaging systems.

     

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